For citations:
Ambartsumov M., Altakhov A., Tarala V., Martens V., Lisitsyn S. GROWTH OF ALUMINUM NITRIDE THIN FILMS VIA PEALD WITH VARIOUS PLASMA EXPOSITION DURATIONS. Newsletter of North-Caucasus Federal University. 2016;(2):7-12. (In Russ.)
Ambartsumov M., Altakhov A., Tarala V., Martens V., Lisitsyn S. GROWTH OF ALUMINUM NITRIDE THIN FILMS VIA PEALD WITH VARIOUS PLASMA EXPOSITION DURATIONS. Newsletter of North-Caucasus Federal University. 2016;(2):7-12. (In Russ.)