For citations:
Tarala V.A., Titarenko A.A., Belashov I.V., Shevchenko M.Yu. DEPOSITION OF NANOCRYSTALLINE CARBON FILMS. Newsletter of North-Caucasus Federal University. 2013;(4):55-60. (In Russ.)
Tarala V.A., Titarenko A.A., Belashov I.V., Shevchenko M.Yu. DEPOSITION OF NANOCRYSTALLINE CARBON FILMS. Newsletter of North-Caucasus Federal University. 2013;(4):55-60. (In Russ.)