XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
Abstract
The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.
About the Authors
Roman V. Pigulev
NCFU
Russian Federation
Russian Federation
Konstantin I. Sidorov
NCFU
Russian Federation
Russian Federation
Vitaliy A. Tarala
NCFU
Russian Federation
Russian Federation
Sergey V. Lisitsyn
NCFU
Russian Federation
Russian Federation
Elena N. Belyaeva
NCFU
Russian Federation
Russian Federation
Maria V. Moskvicheva
technology park «Skolkovo»
Russian Federation
Russian Federation
References
1. Валюхов Д. П., Пигулев Р. В., Сидоров К. И., Тарала В. А., Титаренко А.А., Шевченко М. Ю. КРС-анализ пленок алмазоподобного углерода // Сборник научных трудов Sworld. 2013. Т. 11. № 2. С. 55-60.
2. Сидоров К. И., Лисицын С. В., Зубрилов В. Г., Пигулев Р. В., Валюхов Д. П. Методика исследования гидрогенизированного карбида кремния масс-спектрометрией вторичных нейтральных частиц // Вестник Северо-Кавказского федерального университета. 2011. № 1. С. 16-18.
Review
For citations:
Pigulev R.V., Sidorov K.I., Tarala V.A., Lisitsyn S.V., Belyaeva E.N., Moskvicheva M.V. XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS. Newsletter of North-Caucasus Federal University. 2014;(5):29-34. (In Russ.)
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