RAMAN SCATTERING IN CONDENSATE PRODUCTS OF ION-BEAM AND MAGNETRON SPUTTERING OF GRAPHITE
Abstract
There has been a spectroscopic analysis of Raman scattering and an analysis of atomic-force microscopyfor disordered carbon thin films vacuum-deposited on silicon substrate using scattering of graphite target. The comparative experiments and evaluations were done under different conditions both using impulse magnetron (Ar, Ar:CH4) and ion-beam Ar+ method for graphite sputtering. There was an analysis of the informational capacity of light scattering specters and AFM-images of nanostructured and amorphous film samples. Based on the analytical data, there was a study into the synthesis conditions as well as film spectral features; there was also an evaluation done of the potential offered by spectroscopy of Raman scattering viewed as a source of data regarding carbon studies.
About the Authors
Evgheny F. Shevchenko
NCFU
Russian Federation
Russian Federation
Igor A. Sysoev
NCFU
Russian Federation
Russian Federation
Fedor F. Malyavin
NCFU
Russian Federation
Russian Federation
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Review
For citations:
Shevchenko E.F., Sysoev I.A., Malyavin F.F. RAMAN SCATTERING IN CONDENSATE PRODUCTS OF ION-BEAM AND MAGNETRON SPUTTERING OF GRAPHITE. Newsletter of North-Caucasus Federal University. 2014;(6):85-89. (In Russ.)
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